Automatic sampling of hot phosphoric acid for the determination of chemical element concentrations and control of semiconductor processes
US11710640B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 5, 2019 |
| Grant date | Jul 25, 2023 |
| Priority date | — |
| Expiry date | Feb 23, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/31111
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems and methods for automatic sampling of a sample for the determination of chemical element concentrations and control of semiconductor processes are described. A system embodiment includes a remote sampling system configured to collect a sample of phosphoric acid at a first location, the remote sampling system including a remote valve having a holding loop coupled thereto; and an analysis system configured for positioning at a second location remote from the first location, the analysis system coupled to the remote valve via a transfer line, the analysis system including an analysis device configured to determine a concentration of one or more components of the sample of phosphoric acid and including a sample pump at the second location configured to introduce the sample from the holding loop into the transfer line for analysis by the analysis device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.