Droplet accelerating assembly and extreme ultra-violet lithography apparatus including the same
US11711883B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 4, 2021 |
| Grant date | Jul 25, 2023 |
| Priority date | — |
| Expiry date | Sep 30, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/7055
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A droplet accelerating assembly includes an acceleration chamber extending in a first direction parallel to an ejection direction of the droplet, the acceleration chamber having a first side connected to the droplet generator, a second side opposite the first side in the first direction, the second side including a discharge hole, and a fluid flow path, a pressure controller connected to the fluid flow path of the acceleration chamber, the pressure controller being configured to adjust an internal pressure of the acceleration chamber, an electrifier in the acceleration chamber, the electrifier being configured to electrify the droplet ejected by the droplet generator into an electrified droplet, and an accelerator in the acceleration chamber, the accelerator being configured to accelerate the electrified droplet.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.