Conformal optical coatings for non-planar substrates
US11714212B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 10, 2021 |
| Grant date | Aug 1, 2023 |
| Priority date | — |
| Expiry date | Sep 10, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B1/14
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Optical coatings for curved or non-planar substrates are disclosed. Optical coatings may include AR (antireflection) coatings or absorbing (“black” optical) coatings. The optical coatings may include a nanostructure layer formed on top of a stack of one or more materials. Both the nanostructure layer and the stack may be deposited on a curved or non-planar substrate using plasma-enhanced atomic layer deposition (PEALD) to provide conformal coating of the substrate. The nanostructure layer may include a mixture of aluminum hydroxide and aluminum oxide hydroxide that is formed by placing a PEALD-deposited aluminum oxide layer in heated deionized water for a predetermined time period. The materials in the stack may be alternated to provide tuning of the optical properties in the optical coating.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.