Patent · US Active

Pressure compensation chamber

US11714433B2 · kind B2 · utility

0Cited by

1References

21Claims

0Family size

Assignee

FAS MEDIC S.A. · CH

Inventors

Davide Azzoni · Meyrin, CH
Manuel Diaz · Loëx, CH
Teddy Blampey · Poisy, FR

Key dates

Filing date	Apr 30, 2020
Grant date	Aug 1, 2023
Priority date	—
Expiry date	Jun 12, 2041

Classification

Technology area (CPC G)Physics
CPC primaryG01F15/028
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

There is provided a fluid sensing apparatus comprising a fluid flow channel, at least one fluid conduit in fluid communication with the fluid flow channel, and a fluid sensor having a casing and at least one sensor port in fluid communication with the at least one fluid conduit and providing access into the casing. The fluid sensing apparatus also includes a pressure compensation chamber in which the casing of the fluid sensor is enclosed. The apparatus further includes at least one pressure compensation conduit in fluid communication with the pressure compensation chamber and with the fluid flow channel. Also provided is a mass flow controller including such a fluid sensing apparatus.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.