Patent · US Active

Semiconductor image processing apparatus

US11715189B2 · kind B2 · utility

0Cited by
3References
9Claims
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Key dates

Filing dateJul 20, 2020
Grant dateAug 1, 2023
Priority date
Expiry dateApr 23, 2041

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG06T2207/30148
  • WIPO fieldComputer technology
  • WIPO sectorElectrical engineering

Abstract

A semiconductor image processing apparatus has an image input unit inputs a first semiconductor image, an exposure condition input unit configured to input exposure conditions, a generator performs a process of extracting a feature amount in consideration of the exposure conditions while reducing resolution of the first semiconductor image and thereafter use the extracted feature amount to increase the resolution to generate a second semiconductor image, and a discriminator configured to discriminate whether the input image is the second semiconductor image or a third semiconductor image provided in advance. The generator performs learning so that the discriminator erroneously discriminates the second semiconductor image as the third semiconductor image based on a result discriminated by the discriminator. The discriminator performs learning so as not to erroneously discriminate the second semiconductor image as the third semiconductor image, and not to erroneously discriminate the third semiconductor image as the second semiconductor image.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.