Electromechanical microsystem comprising an active element having a structured core layer

US11716907B2 · kind B2 · utility

Assignee

• COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

• Thierry Hilt · Barraux, FR
• Stephane Fanget · Grenoble, FR
• Loic Joet · Grenoble, FR

Key dates

• Filing date: Dec 17, 2019
• Grant date: Aug 1, 2023
• Expiry date: Oct 22, 2041

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10N30/073
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A MicroElectroMechanical System is provided, with an active element configured to carry out an electromechanical function, the active element including, from an upper face to a lower face substantially parallel to the upper face, an active layer, a core layer, and a retention layer, the active layer being configured to, under the effect of a first electric signal, go into a mechanically stressed state, configured to generate a bending of the active element in a direction perpendicular to a front face thereof, and vice versa, the active layer, the core layer, and the retention layer being arranged so that a neutral axis, associated with an elongation of zero in a case of bending of the active element, is located in a volume of one or the other of the core layer and of the retention layer, and the core layer further includes at least 20% recesses in its volume.