Gas leak sensing device, setting method for gas leak sensing, gas leak sensing method, and tangible medium
US11719596B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 1, 2021 |
| Grant date | Aug 8, 2023 |
| Priority date | — |
| Expiry date | Jul 24, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F5/005
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A gas leak sensing device includes a constant flow rate control valve, a pressurization control valve, a supply-side gas circuit, a master-side gas circuit, a workpiece-side gas circuit, an equal pressure valve, an exhaust valve, a test pressure sensor, and a differential pressure sensor. The supply-side gas circuit is connected with the constant flow rate control valve and the pressurization control valve. The equal pressure valve performs opening and closing between the supply-side gas circuit and the master-side gas circuit and opening and closing between the supply-side gas circuit and the workpiece-side gas circuit. The exhaust valve performs opening and closing between the workpiece-side gas circuit and outside. The test pressure sensor detects pressure in the supply-side gas circuit. The differential pressure sensor detects a differential pressure between the master-side gas circuit and the workpiece-side gas circuit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.