Electrical/optical multimodal sensor using multi-functional 3D nano-architecture materials and manufacturing method thereof
US11719664B2 · kind B2 · utility
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Key dates
| Filing date | Aug 27, 2019 |
| Grant date | Aug 8, 2023 |
| Priority date | — |
| Expiry date | Mar 10, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D62/121
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A multimodal sensor of high sensitivity and high selectivity using multifunctional three-dimensional nanostructure having electric and optical sensing ability and a method thereof are provided. The method includes forming multi-layered nanowires including a multifunctional material, transferring the nanowires to a plurality of layers onto a target substrate to form the three-dimensional nanostructure, heat-treating the three-dimensional nanostructure, and forming electrode layers at the three-dimensional nanostructure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.