Test method and device for contact resistor
US11719730B2 · kind B2 · utility
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7References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 30, 2021 |
| Grant date | Aug 8, 2023 |
| Priority date | — |
| Expiry date | Mar 18, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03K17/687
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A test method and device for a contact resistor are provided, configured to test a contact resistor of a metal-oxide-semiconductor (MOS) transistor. The method includes: a resistance value per area and a temperature coefficient of resistance of the contact resistor are acquired; and a target resistance value of the contact resistor is determined according to the resistance value per area, the temperature coefficient of resistance, and an area of the contact resistor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.