Material management method and system
US11720033B2 · kind B2 · utility
1Cited by
1References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 15, 2021 |
| Grant date | Aug 8, 2023 |
| Priority date | — |
| Expiry date | Sep 18, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06Q10/087
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method includes: storing a carrier containing material in a storage; recording environmental data of the storage to a database while the material is in the storage; generating a forecast for the material in the carrier based on the environmental data; receiving a request for the material from a semiconductor fabrication tool; and providing the carrier to the semiconductor fabrication tool based on the forecast.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.