Method of pumping in a system of vacuum pumps and system of vacuum pumps
US11725662B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 6, 2020 |
| Grant date | Aug 15, 2023 |
| Priority date | — |
| Expiry date | May 26, 2040 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04C2270/185
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A pumping method in a pumping system comprises: a main vacuum pump with a gas inlet port connected to a vacuum chamber and a gas outlet port leading into a conduit before coming out into the gas outlet of the pumping system, a non-return valve positioned in the conduit between the gas outlet port and the gas outlet, and an auxiliary vacuum pump connected in parallel to the non-return valve. The main vacuum pump is activated in order to pump the gases contained in the vacuum chamber through the gas outlet port, simultaneously the auxiliary vacuum pump is activated and continues to operate all the while that the main vacuum pump pumps the gases contained in the vacuum chamber and/or all the while that the main vacuum pump maintains a defined pressure in the vacuum chamber. Also included is a pumping system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.