Graded pore structure without phase mask
US11726236B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Aug 5, 2021 |
| Grant date | Aug 15, 2023 |
| Priority date | — |
| Expiry date | Aug 5, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03H2270/13
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method to form a three-dimensional photonic crystal template with a gradient structure involves irradiating a photoresist composition of a thickness of at least 15 μm from at least four laser beams to yield a periodic patterned with a percolating matrix of mass in constructive volumes of a cured photoresist composition and destructive volumes of voids free of condensed matter where the proportion of constructive volume displays a gradient from the irradiated surface to the substrate after development. For a given light intensity, photoinitiator concentration in the photoresist composition, and a given thickness, by irradiating for a relatively short period, a three-dimensional photonic crystal template displaying a gradient having greater constructive volume proximal the air interface forms and a relatively long irradiation period results in a gradient having greater constructive volume proximal the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.