Ion current droop compensation
US11728138B2 · kind B2 · utility
0Cited by
8References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 27, 2022 |
| Grant date | Aug 15, 2023 |
| Priority date | — |
| Expiry date | Jun 27, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03K3/57
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In some embodiments, a high voltage power supply is disclosed that provides a plurality of high voltage pulses without any voltage droop between two subsequent pulses. In some embodiments, a high voltage power supply is disclosed that provides a waveform of voltage versus time having a plurality of high voltage pulses having a voltage greater than 1 kV and with a substantially flat portion between pulse. In some embodiments, a high voltage power supply is disclosed that includes a snubber with a snubber resistor having a resistance of about 7.5 mΩ1.25Ω; and a snubber capacitor having a capacitance of about 2 μF-35 μF.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.