Powder for coating an etch chamber
US11731883B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 31, 2019 |
| Grant date | Aug 22, 2023 |
| Priority date | — |
| Expiry date | Jun 4, 2040 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01P2006/14
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A powder of melted particles, more than 95% by number of the particles exhibiting a circularity of greater than or equal to 0.85. The powder including more than 99.8% of a rare earth metal oxide and/or of hafnium oxide and/or of an aluminum oxide, as percentage by mass based on the oxides. The powder has a median particle size D50 of less than 15 μm, a 90 percentile of the particle sizes, D90, of less than 30 μm, and a size dispersion index (D90−D10)/D10 of less than 2, and a relative density of greater than 90%. The Dn percentiles of the powder are the particle sizes corresponding to the percentages, by number, of n %, on the cumulative distribution curve of the size of the particles in the powder and the particle sizes are classified by increasing order.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.