Patent · US Active

Probe head and probe card

US11733267B2 · kind B2 · utility

1Cited by

3References

8Claims

0Family size

Assignee

MPI CORPORATION · TW

Inventors

Che-Wei Lin · New Taipei, TW
Ting-Ju Wu · Dashulong, TW
Keng-Min Su · Dashulong, TW
Chin-Yi Lin · Yuanchang, TW

Key dates

Filing date	Mar 18, 2020
Grant date	Aug 22, 2023
Priority date	—
Expiry date	Mar 18, 2040

Classification

Technology area (CPC G)Physics
CPC primaryG01R31/2891
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A probe head includes an upper guide plate, a lower guide plate, and a plurality of probes. The upper guide plate includes a groove, and the upper guide plate is provided with an upper surface, a lower surface and a plurality of probe holes vertically penetrating the upper surface and the lower surface along a first direction. The groove is depressed from the upper surface, and provided with a groove bottom surface. The groove bottom surface is located between the upper surface and the lower surface. The lower guide plate is disposed on the upper guide plate. The probe is disposed in the groove. An end portion of a probe tail of the probe is located between the groove bottom surface and the upper surface. A probe card is also provided and the probe card includes a circuit board, a space transformer, and the probe head.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.