Process for making a metallic grating
US11733439B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 25, 2022 |
| Grant date | Aug 22, 2023 |
| Priority date | — |
| Expiry date | Oct 25, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B5/1861
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A metallic grating is formed to include a substrate; a plurality of high aspect ratio trenches disposed in the substrate such that the high aspect ratio trenches are spaced apart from one another by a field surface of the substrate; a metallic superconformal filling formed and disposed in the high aspect ratio trenches; and a grating including a spatial arrangement of the high aspect ratio trenches that are filled with the metallic superconformal filling such that the metallic superconformal filling is void-free, and the high aspect ratio trenches are bottom-up filled with the metallic superconformal filling, wherein a height of the metallic superconformal filling is less than or equal to the height of the high aspect ratio trenches.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.