Optical device
US11733509B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 6, 2018 |
| Grant date | Aug 22, 2023 |
| Priority date | — |
| Expiry date | Jul 21, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J3/45
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical device includes an elastic support portion which includes a torsion bar which extends along a second direction perpendicular to a first direction and a nonlinearity relaxation spring which is connected between the torsion bar and a movable portion. The nonlinearity relaxation spring is configured so that a deformation amount of the nonlinearity relaxation spring around the second direction is smaller than a deformation amount of the torsion bar around the second direction and a deformation amount of the nonlinearity relaxation spring in a third direction perpendicular to the first direction and the second direction is larger than a deformation amount of the torsion bar in the third direction while the movable portion moves in the first direction. A comb electrode is disposed along an outer edge of the movable portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.