Patent · US Active

Charged-particle source

US11735391B2 · kind B2 · utility

2Cited by

110References

20Claims

0Family size

Assignee

IMS Nanofabrication GmbH · AT

Inventors

Stefan Gerhold · Wien, AT
Werner Rupp · Bischofswerda, DE
Mattia Capriotti · Villach, AT
Christoph Spengler · Wien, AT

Key dates

Filing date	Apr 19, 2021
Grant date	Aug 22, 2023
Priority date	—
Expiry date	Apr 19, 2041

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/06375
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A charged-particle source for generating a charged-particle comprises a sequence of electrodes, including an emitter electrode with an emitter surface, a counter electrode held at an electrostatic voltage with respect to the emitter electrode at a sign opposite to that of the electrically charged particles, and one or more adjustment electrodes surrounding the source space between the emitter electrode and the counter electrode. These electrodes have a basic overall rotational symmetry along a central axis, with the exception of one or more steering electrodes which is an electrode which interrupts the radial axial-symmetry of the electric potential of the source, for instance tilted or shifted to an eccentric position or orientation, configured to force unintended, secondary charged particles away from the emission surface.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.