Substrate storage container
US11735449B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 1, 2018 |
| Grant date | Aug 22, 2023 |
| Priority date | — |
| Expiry date | Mar 22, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate storage container includes a container main body having an opening at the front, a support portion for supporting a substrate in the interior thereof, and a substrate receiving portion positioned more toward a rear wall than the support portion, an a lid on which a substrate pressing portion for pressing the substrate is formed. The substrate receiving portion and the substrate pressing portion are present within a range of greater than or equal to 0 mm and less than or equal to 80 mm in the horizontal direction from a vertical center line that passes through the center of the container main body when the lid is viewed from the front.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.