Film bulk acoustic resonators in thin LN-LT layers
US11736090B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 29, 2021 |
| Grant date | Aug 22, 2023 |
| Priority date | — |
| Expiry date | Oct 29, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/568
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Acoustic resonator devices, filter devices, and methods of fabrication. A resonator device includes a piezoelectric plate having a front surface and a back surface opposite the front surface, a back-side conductor pattern formed on the back surface, and a first front-side conductor pattern and a second front-side conductor pattern formed on respective portions of the front surface opposite the back-side conductor pattern. A portion of the piezoelectric plate between the first front-side conductor pattern and the back-side conductor pattern forms a first resonator and a portion of the piezoelectric plate between the second front-side conductor pattern and the back-side conductor pattern forms a second resonator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.