Capactive micromachined transducer having a high contact resistance part
US11738369B2 · kind B2 · utility
0Cited by
4References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 17, 2020 |
| Grant date | Aug 29, 2023 |
| Priority date | — |
| Expiry date | Aug 16, 2041 |
Classification
- Technology area (CPC A)Human Necessities
- CPC primaryA61B8/4494
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
A capacitive transducer comprising a top electrode and a bottom electrode, and a sidewall between the top electrode and the bottom electrode. The sidewall is configured to separate the top electrode and the bottom electrode by a gap. There is a high contact resistance part on one or both of a bottom side of the top electrode or a top side of the bottom electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.