Metal mask, method of manufacturing the same, and method of manufacturing display panel using the metal mask
US11739420B2 · kind B2 · utility
0Cited by
2References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 4, 2020 |
| Grant date | Aug 29, 2023 |
| Priority date | — |
| Expiry date | Oct 8, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/851
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A deposition mask includes a metal mask body in which a deposition opening is defined; and a coating layer including aluminum oxynitride, on an outer surface of the metal mask body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.