Adjustable self-heating diaphragm vacuum gauge
US11740151B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 9, 2022 |
| Grant date | Aug 29, 2023 |
| Priority date | — |
| Expiry date | May 9, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0072
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An improved diaphragm vacuum gauge includes a pressure receiving unit having an electrical property that changes in accordance with displacement of a diaphragm caused by pressure of a measurement target medium; a heater that heats the pressure receiving unit; a temperature sensor that measures a temperature of the pressure receiving unit; a pressure measurement unit that converts a change in the electrical property of the pressure receiving unit to a pressure measurement value; a storage unit that stores a plurality of heating temperature settings; a heating temperature setting unit that selects one heating temperature setting from among the plurality of heating temperature settings in accordance with a digital input signal that is externally input; and a controller that controls power supply to the heater based on the temperature measured by the temperature sensor and the heating temperature setting selected by the heating temperature setting unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.