Dual-optical displacement sensor alignment using knife edges
US11740356B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 13, 2021 |
| Grant date | Aug 29, 2023 |
| Priority date | — |
| Expiry date | Nov 16, 2041 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E60/10
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A dual-optical displacement sensor system includes a scanner including a first and second scanner head including optical displacement sensors providing a first and second beam having a first optical axis (OA) and a second OA. A computing device or programmed circuit is coupled to receive time versus position data from measurements involving alignment target(s) including at least one knife edge pair including a first and second knife edge oriented in a first plane of the alignment target that is essentially perpendicular to the OAs positioned between the scanner heads for interacting with the beams, and implement at least one equation to analyze the data for determining a degree of alignment of the first and second OA. Using the degree of alignment, an algorithm is for automatic alignment of the OAs or assist instructions for a user alignment of the OAs that provides guiding steps for the user for the alignment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.