Barrier structure with passage for waveguide in photonic integrated circuit

US11740418B2 · kind B2 · utility

Assignee

• GLOBALFOUNDRIES U.S. Inc. · US

Inventors

• Nicholas A. Polomoff · Irvine, US
• John J. Ellis-Monaghan · Grand Isle, US
• Frank Kuechenmeister · Dresden, DE
• Jae Kyu Cho · Niskayuna, US
• Michal Rakowski · Ballston Lake, US

Key dates

• Filing date: Mar 23, 2021
• Grant date: Aug 29, 2023
• Expiry date: Sep 12, 2041

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B2006/12119
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

Embodiments of the disclosure provide a photonic integrated circuit (PIC) structure with a passage for a waveguide through a barrier structure. The PIC structure includes a barrier structure on a substrate, having a first sidewall and a second sidewall opposite the first sidewall. A passage is within the barrier structure, and extends from a first end at the first sidewall of the barrier structure to a second end at the second sidewall of the barrier structure. A shape of the passage includes a reversal segment between the first end and the second end. A waveguide within the passage and extends from the first end to the second end of the barrier structure.