Sensors with corrugated diaphragms
US11743652B2 · kind B2 · utility
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3References
22Claims
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Assignee
Inventors
Key dates
| Filing date | Oct 18, 2019 |
| Grant date | Aug 29, 2023 |
| Priority date | — |
| Expiry date | Oct 18, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R19/005
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A sensor includes a substrate; and a corrugated diaphragm offset from the substrate. The corrugated diaphragm is configured to deflect responsive to a sound wave impinging on the corrugated diaphragm. A cavity is defined between the corrugated diaphragm and the substrate, the corrugated diaphragm forming a top surface of the cavity and the substrate forming a bottom surface of the cavity. A pressure in the cavity is lower than a pressure outside of the cavity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.