Mask, preparation method and operation method thereof
US11746406B2 · kind B2 · utility
2Cited by
0References
7Claims
0Family size
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Key dates
| Filing date | Dec 18, 2017 |
| Grant date | Sep 5, 2023 |
| Priority date | — |
| Expiry date | Apr 26, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/166
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A mask, and a preparation method and an operation method thereof are disclosed. The mask includes: a support and a mask strip mounted on the support, the mask strip including at least two connecting portions connected with the support, and a pattern portion located between the connecting portions, the pattern portion including a first outer surface, and the connecting portion including a second outer surface; wherein the second outer surface and the first outer surface are non-coplanar with each other.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.