Method and device for scanning a sample

US11747604B2 · kind B2 · utility

Assignee

• LEICA MICROSYSTEMS CMS GMBH · DE

Inventors

• Lars Friedrich · Weinheim, DE
• Holger Birk · Meckesheim, DE

Key dates

• Filing date: Nov 5, 2018
• Grant date: Sep 5, 2023
• Expiry date: Jan 28, 2040

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B21/365
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A method for scanning a sample includes generating at least two illumination points in order to form a point pattern, wherein the point pattern has a settable number of illumination points. At least one freely selectable parameter for defining the point pattern is preset or is set. At least one predefined region of the sample is scanned by moving the point pattern defined by the freely selectable parameter along a first direction such that scan lines assigned to the illumination points of the point pattern are generated, and along a second direction such that further scan lines are generated in each case following the scan lines. The movement of the point pattern in the second direction is carried out in scan steps of identical size or at a constant speed. The illumination points of the point pattern are arranged on a line along the second direction.