Setting up inspection of a specimen
US11748872B2 · kind B2 · utility
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11References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 2, 2021 |
| Grant date | Sep 5, 2023 |
| Priority date | — |
| Expiry date | Dec 4, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methods and systems for setting up inspection of a specimen are provided. One system includes one or more computer subsystems configured for acquiring a reference image for a specimen and modifying the reference image to fit the reference image to a design grid thereby generating a golden grid image. The one or more computer subsystems are also configured for storing the golden grid image for use in inspection of the specimen. The inspection includes aligning a test image of the specimen generated from output of an inspection subsystem to the golden grid image.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.