Chuck for acquiring a warped workpiece
US11749551B2 · kind B2 · utility
0Cited by
9References
9Claims
0Family size
Assignee
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Key dates
| Filing date | Feb 8, 2021 |
| Grant date | Sep 5, 2023 |
| Priority date | — |
| Expiry date | Feb 8, 2041 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF25B2309/003
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
A chuck includes a chuck surface, a plurality of vacuum ports being distributed over the chuck surface. Each of the vacuum ports is open to a conduit that is connectable to a suction source that is operable to apply suction to that vacuum port. A flow restrictor is located within each conduit and is characterized by a flow resistance. The flow resistance of the flow restrictor in at least one conduit is less than the flow resistance of the flow restrictor in at least one other conduit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.