Holding system for supporting a wafer and an optical element conformed so as to form an optical system and a method for forming such optical system
US11752712B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 13, 2019 |
| Grant date | Sep 12, 2023 |
| Priority date | — |
| Expiry date | Aug 18, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/294
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Disclosed is a holding system for supporting a wafer having a first surface, a second surface and a third surface joining the first and second surfaces, and an optical element having a first surface, a second surface and a third surface joining the first and second surfaces, the holding system including: a support including first support unit configured to support the second and/or third surface of the wafer and second support unit configured to support the second and/or third surface of the optical element; a positioning unit configured to position the second surface of the wafer relative to the first surface of the optical element; and a mechanical unit configured to move the first and second support units one relative to the other so as to move the second surface of the wafer and the first surface of the optical element to form an optical system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.