Support, bonding apparatus including the support, and method of fabricating display device using the bonding apparatus
US11752753B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 2, 2021 |
| Grant date | Sep 12, 2023 |
| Priority date | — |
| Expiry date | Oct 6, 2041 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E10/549
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A bonding apparatus includes a support including a cavity, and a window fixing chuck facing the support. The support includes a first part including a first through hole extending from the cavity, and a second part extending in a downward direction from the first part and including a second through hole extending from the cavity. A first distance between a first inner surface of the first part and a first outer surface of the first part is less than a second distance between a second inner surface of the second part and a second outer surface of the second part. The first inner surface of the first part and the second inner surface of the second part form the cavity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.