Patent · US Active

Interferometer element, spectrometer and method for operating an interferometer

US11754445B2 · kind B2 · utility

0Cited by
3References
14Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 22, 2019
Grant dateSep 12, 2023
Priority date
Expiry dateDec 23, 2039

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01J3/4535
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

The disclosure relates to an interferometer element for use in a spectrometer which includes a micromechanical Fabry-Perot filter element, which has at least a first mirror element, a second mirror element, and a third mirror element. Each of the first mirror element, the second mirror element, and the third mirror element are arranged in series in an optical path of the interferometer element, and at least one of a first distance between the first and second mirror elements, and a second distance between the second and third mirror elements is modifiable.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.