Interferometer element, spectrometer and method for operating an interferometer
US11754445B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 22, 2019 |
| Grant date | Sep 12, 2023 |
| Priority date | — |
| Expiry date | Dec 23, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J3/4535
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The disclosure relates to an interferometer element for use in a spectrometer which includes a micromechanical Fabry-Perot filter element, which has at least a first mirror element, a second mirror element, and a third mirror element. Each of the first mirror element, the second mirror element, and the third mirror element are arranged in series in an optical path of the interferometer element, and at least one of a first distance between the first and second mirror elements, and a second distance between the second and third mirror elements is modifiable.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.