Integrated piezoresistive and piezoelectric fusion force sensor
US11754451B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 14, 2022 |
| Grant date | Sep 12, 2023 |
| Priority date | — |
| Expiry date | Dec 14, 2042 |
Classification
- Technology area (CPC —)General
Abstract
Described herein is a ruggedized microelectromechanical (“MEMS”) force sensor including both piezoresistive and piezoelectric sensing elements and integrated with complementary metal-oxide-semiconductor (“CMOS”) circuitry on the same chip. The sensor employs piezoresistive strain gauges for static force and piezoelectric strain gauges for dynamic changes in force. Both piezoresistive and piezoelectric sensing elements are electrically connected to integrated circuits provided on the same substrate as the sensing elements. The integrated circuits can be configured to amplify, digitize, calibrate, store, and/or communicate force values electrical terminals to external circuitry.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.