Multimodal inspection system
US11756157B2 · kind B2 · utility
1Cited by
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20Claims
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Key dates
| Filing date | Mar 29, 2021 |
| Grant date | Sep 12, 2023 |
| Priority date | — |
| Expiry date | Feb 25, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/95638
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A multimodal inspection system (MIS) is disclosed herein. The MIS may use one or more modalities to inspect a sample. Some of the modalities include, but are not limited to, Raman, visible (VIS), terahertz (THz) spectroscopy, longwave infrared (LWIR), shortwave infrared (SWIR), laser profilometry (LP), electromagnetic interference (EMI) near field probing, and/or, Millimeter Wave (MMW) radar.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.