Peeling device and peeling method using the same
US11760080B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 26, 2021 |
| Grant date | Sep 19, 2023 |
| Priority date | — |
| Expiry date | Aug 26, 2041 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T156/1126
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A peeling device includes a peeling tank for containing a first solution therein, a support portion on which a stack structure including a base layer extending in a first direction and a film coupled with the base layer is disposed, the support portion being disposed in the peeling tank and an adsorption device for adsorbing the base layer thereon to peel off the base layer from the film, the adsorption device including an adsorption portion for adsorbing the base layer, and a moving portion coupled with the adsorption portion for moving the adsorption portion to allow the base layer to be bent to a second direction crossing the first direction and to be peeled off from the film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.