Alumina sintered body and manufacturing method therefor
US11760694B2 · kind B2 · utility
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9Claims
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Key dates
| Filing date | Oct 2, 2018 |
| Grant date | Sep 19, 2023 |
| Priority date | — |
| Expiry date | Mar 27, 2040 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC04B2235/963
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
The present invention relates to an alumina sintered body and a manufacturing method therefor; for example, the present invention relates to an alumina sintered body that is suitably utilized for a member or similar used in a plasma processing device, an etcher for semiconductor/liquid crystal display device manufacturing, a CVD device, or similar, or that is suitably utilized for a substrate or similar of a plasma-resistant member which is to be coated, as well as a manufacturing method for said alumina sintered body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.