ALD apparatus, method and valve
US11761082B2 · kind B2 · utility
0Cited by
9References
30Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 2, 2017 |
| Grant date | Sep 19, 2023 |
| Priority date | — |
| Expiry date | Dec 3, 2037 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16K1/446
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An apparatus, a method and a valve with a reactive chemical inlet, a reaction chamber outlet, and a closure having an open and closed configuration to open and close, respectively, a route from the reactive chemical inlet to the reaction chamber outlet, the valve further including an additional cleaning chemical inlet at a downstream side of the closure to purge the closure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.