Integrated particulate matter sensor with cavity
US11761876B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 21, 2022 |
| Grant date | Sep 19, 2023 |
| Priority date | — |
| Expiry date | Oct 21, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2015/1486
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A particulate matter (PM) sensor comprises a substrate forming a cavity (5), the substrate comprising a semiconductor chip (4), and a light source (1) arranged in the cavity (5). The light source (1) is adapted to emit a light beam (7). The light beam (7) forms a detection volume (8) for particulate matter (9) outside the cavity (5). Optionally, the particulate matter sensor comprises an optical element (2) delimiting the cavity (5) at one end. The optical element (2) is configured to shape the light beam (7). Further, the particulate matter sensor comprises at least one photodetector (3) that is integrated into a surface of the semiconductor chip (4). The surface into which the at least one photodetector (3) is integrated faces the detection volume (8). The at least one photodetector (3) is adapted to detect light (10) scattered by particulate matter (9) in the detection volume (8).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.