Photoacoustic transducer
US11761884B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jan 27, 2020 |
| Grant date | Sep 19, 2023 |
| Priority date | — |
| Expiry date | Sep 15, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/06113
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An integrated photoacoustic transducer, sensing system and method for assisting in sensing a concentration of a species in a fluid such that the integrated photoacoustic transducer includes a waveguide structure. The waveguide structure has an optical resonance spectrally overlapping a spectral absorption line or band of the species. The photoacoustic transducer includes at least one acoustic cavity formed in a portion of the waveguide structure and configured for receiving the fluid for sensing comprising the species. The at least one acoustic cavity has an acoustic resonance spectrally overlapping with a harmonic of a modulation frequency. At least one acoustic transducer comprising a deformable mechanical portion is included in the photoacoustic transducer. The deformable mechanical portion is in direct acoustic communication with the at least one acoustic cavity and has an adjustable mechanical resonance, which can be brought into spectral overlap with an acoustic resonance of the least one acoustic cavity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.