Semiconductor device, method of manufacturing the same, display device, photoelectric conversion device, electronic device, illumination device, and mobile object
US11765927B2 · kind B2 · utility
0Cited by
2References
22Claims
0Family size
Assignee
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Key dates
| Filing date | Oct 31, 2019 |
| Grant date | Sep 19, 2023 |
| Priority date | — |
| Expiry date | Mar 3, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K59/871
Abstract
There is provided a semiconductor device having a semiconductor element and a protective film that is disposed above the semiconductor element and contains silicon atoms and nitrogen atoms, wherein the protective film has an average number of nitrogen atoms bonded to one silicon atom of less than or equal to 1.35.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.