Imprint apparatus and method of manufacturing article
US11768444B2 · kind B2 · utility
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3References
5Claims
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Assignee
Inventor
Key dates
| Filing date | Nov 26, 2019 |
| Grant date | Sep 26, 2023 |
| Priority date | — |
| Expiry date | Sep 19, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An imprint apparatus that cures an imprint material on a substrate in a state where a mold is in contact with the imprint material includes a substrate holding unit having a plurality of holding regions that holds the substrate, and a control unit configured to control a pressure in each of the holding regions independently, wherein the control unit controls the pressure based on at least one of shape information and distortion information of the substrate, at least when the imprint material is cured.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.