High-frequency amplifier assembly for a high-frequency generator
US11770892B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 16, 2021 |
| Grant date | Sep 26, 2023 |
| Priority date | — |
| Expiry date | Jan 2, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H2242/20
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The high-frequency amplifier assembly for a high-frequency generator, in particular for a high-frequency generator for operating a plasma generator, is provided with a signal generator for generating a high-frequency signal; a first amplifier transistor for amplifying the signal generated by the signal generator; an output terminal for outputting the amplified signal to an external load; an input network arranged between the signal generator and the first amplifier transistor for providing the high-frequency signal at the input of the amplifier transistor; an output network arranged between the amplifier transistor and the external load for providing a desired load impedance for the amplifier transistor; and an electronic voltage-limiting assembly arranged at the output terminal for limiting the output voltage at the output terminal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.