Patent · US Active

Plasma treatment apparatus for producing coatings

US11772128B2 · kind B2 · utility

0Cited by

7References

17Claims

0Family size

Assignee

Schott AG · DE

Inventors

Matthias Bicker · Mainz, DE
Manfred Lohmeyer · Nackenheim, DE
Hartmut Bauch · Ober-Olm, DE

Key dates

Filing date	Apr 21, 2020
Grant date	Oct 3, 2023
Priority date	—
Expiry date	Apr 27, 2041

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB05D2259/00
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

An apparatus and to a method for treating layers using a plasma zone sealed from the outer atmospheric pressure are provided. The apparatus and method include a plasma reactor including a substrate carrier in form of a container receiving means, and a closing element that is joined with the substrate carrier by means of a lifting device.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.