MEMS device with perimeter barometric relief pierce
US11772961B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 26, 2021 |
| Grant date | Oct 3, 2023 |
| Priority date | — |
| Expiry date | Mar 17, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R19/04
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A microelectromechanical systems (MEMS) die includes a first diaphragm and a second diaphragm, wherein the first diaphragm and the second diaphragm bound a sealed chamber. A stationary electrode is disposed within the sealed chamber between the first diaphragm and the second diaphragm. A tunnel passes through the first diaphragm and the second diaphragm without passing through the stationary electrode, wherein the tunnel is sealed off from the chamber. The MEMS die further includes a substrate having an opening formed therethrough, wherein the tunnel provides fluid communication from the opening, through the second diaphragm, and through the first diaphragm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.