Patent · US Active

MXene layers as substrates for growth of highly oriented perovskite thin films

US11773480B2 · kind B2 · utility

1Cited by
1References
8Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 9, 2018
Grant dateOct 3, 2023
Priority date
Expiry dateOct 10, 2038

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/0228
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

The present disclosure is directed to using MXene compositions as templates for the deposition of oriented perovskite films, and compositions derived from such methods. Certain specific embodiments include methods preparing an oriented perovskite, perovskite-type, or perovskite-like film, the methods comprising: (a) depositing at least one perovskite, perovskite-type, or perovskite-like composition or precursor composition using chemical vapor deposition (CVD), physical vapor deposition (PVD), or atomic layer deposition (ALD) onto a film or layer of a MXene composition supported on a substrate to form a layered composition or precursor composition; and either (b) (1) heat treating or annealing the layered precursor composition to form a layered perovskite-type structure comprising at least one oriented perovskite, perovskite-type, or perovskite-like composition; or (2) annealing the layered composition; or (3) both (1) and (2).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.