Vacuum pump, scroll pump, and manufacturing method for such

US11773849B2 · kind B2 · utility

Assignee

• PFEIFFER VACUUM · FR

Inventors

• Michael Willig · Ludwigsburg, DE
• Jan Hofmann · Hamburg, DE
• Jonas BECKER · Lansing, US
• Gernot Bernhardt · Harthausen auf der Scher, DE
• Verena WANGORSCH · Wetzlar, DE
• Stefan Kallenborn · Wetzlar, DE
• Wolfgang Soehngen · Brandoberndorf, DE
• Heiko Schaefer · Erwitte, DE
• Erhard HARAPAT · Aßlar, DE
• Lars PAULI · Solms, DE

Key dates

• Filing date: Oct 6, 2020
• Grant date: Oct 3, 2023
• Expiry date: Oct 21, 2040

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02B30/70
• WIPO field: Engines, pumps, turbines
• WIPO sector: Mechanical engineering

Abstract

The invention relates to a scroll pump comprising a pressure sensor integrated into the scroll pump.