Monolithic sensor arrangement, manufacturing method and measurement method
US11774389B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 28, 2019 |
| Grant date | Oct 3, 2023 |
| Priority date | — |
| Expiry date | Jan 24, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N33/0031
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A monolithic sensor arrangement, a manufacturing method and a measurement method are disclosed. In an embodiment a monolithic gas sensor arrangement includes a sensor including a first transducer with a first sensitive layer and a second transducer with a second sensitive layer, and a readout circuit configured to generate a first measurement signal and a second measurement signal depending on the first and second transducers, wherein the sensor arrangement is a humidity sensor arrangement, wherein the first and second sensitive layers are configured to absorb water molecules, and wherein the first and second sensitive layers differ from each other in at least one property.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.