Method of in situ modulation of structural material properties and/or template shape
US11774467B1 · kind B1 · utility
0Cited by
140References
18Claims
0Family size
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Key dates
| Filing date | Sep 1, 2021 |
| Grant date | Oct 3, 2023 |
| Priority date | — |
| Expiry date | Nov 27, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70025
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Probe structures, probe arrays, have varying intrinsic material properties along their lengths. Methods of forming probes and probe arrays comprise varying the plating parameters to provide varying intrinsic material properties. Some embodiments provide deposition templates created using multiphoton lithography to provide probes with varying lateral configurations along at least portion of their lengths.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.