Deep learning based defect detection
US11776108B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 21, 2021 |
| Grant date | Oct 3, 2023 |
| Priority date | — |
| Expiry date | Jan 14, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06V2201/06
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
Methods and systems for detecting defects on a specimen are provided. One system includes one or more computer systems and one or more components executed by the one or more computer systems. The component(s) include a deep learning model configured for, for a location on a specimen, generating a gray scale simulated design data image from a high resolution image generated at the location by a high resolution imaging system. The computer system(s) are configured for generating a simulated binary design data image for the location from the gray scale simulated design data image. The computer system(s) are also configured for detecting defects at the location on the specimen by subtracting design data for the location from the simulated binary design data image.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.